METHOD FOR PRODUCING INDIUM HYDROXIDE POWDER, METHOD FOR PRODUCING INDIUM OXIDE POWDER, AND SPATTERING TARGET

PROBLEM TO BE SOLVED: To produce an indium hydroxide powder, and an indium oxide powder having an even particle size, and a narrow particle size distribution width.SOLUTION: In a method for producing an indium oxide powder by calcining an indium hydroxide powder obtained by electrolytic reaction usi...

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Hauptverfasser: KAMO TETSUO, TAKADA ISAO, IWASA TAKESHI, SUGAMOTO NORIAKI, MIZUNUMA SHOHEI, KAWAKAMI TETSUSHI, KIBE TATSUO
Format: Patent
Sprache:eng
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