LIGHT IRRADIATION DEVICE

PROBLEM TO BE SOLVED: To provide a light irradiation device that includes an illuminance adjustment mechanism in which center illuminance of a surface to be irradiated is adjusted while an amount of light which an object to be processed receives is maintained to be constant in a light irradiation de...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAYASHIMA TAKAHIRO, HISAMATSU AKIYOSHI
Format: Patent
Sprache:eng
Schlagworte:
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