SUCTION CHUCK AND TRANSFER DEVICE INCLUDING SUCTION CHUCK
PROBLEM TO BE SOLVED: To provide a suction chuck configured to provide a simple compressed-air supply path for each nozzle.SOLUTION: A suction chuck includes a planar main body having an opposing surface 31 opposing a workpiece. A plurality of suction elements injecting gas from the opposing surface...
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Format: | Patent |
Sprache: | eng |
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