OBSERVATION DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD

PROBLEM TO BE SOLVED: To solve such a problem of a conventional charged particle beam device that it is manufactured exclusively for observation under a gas atmosphere of a pressure substantially equivalent to or lower than the atmospheric pressure, and there is no device that allows for convenient...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OMINAMI YUSUKE, KOI ASAMI, ITO SUKEHIRO, KASAI SHINSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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