DEVICE AND METHOD FOR DEFECT DETECTION INCLUDING PATCH TO PATCH COMPARISON

PROBLEM TO BE SOLVED: To accurately identify a defect and noise in die to die defect detection.SOLUTION: On the basis of processing of an inspection frame of an inspection image generated by collecting signals showing a pattern on an article, a system receives at least one candidate defect position in the detection frame (block 301). The system defines a candidate patch in the inspection frame (block 303). The candidate patch has a relation with the candidate defect position. The system specifies at least one similarity patch in the inspection frame by using a predefined similarity determination reference (block 305) and determines the presence or absence of a defect in the candidate defect position on the basis of comparison between at least a portion of the candidate patch and at least a corresponding portion of the at least one similarity patch (block 307).