X-RAY SPECTROSCOPE

PROBLEM TO BE SOLVED: To provide an X-ray spectroscope for spectrally separating the energy spectrum of X-rays which substantially improves wavelength resolution in the measurement using a position sensor and is compact in structure and mechanically simplified so as to be able to simply achieve high accuracy.SOLUTION: An X-ray spectroscope for spectrally separating X-rays emitted from a specimen A with an analyzing crystal 5 and for detecting the X-rays with a detector 4, has a configuration in which the reflection plane of an analyzing crystal is made convex. An incident angle on the analyzing crystal 5 is made larger which is slightly different from an ideal Bragg angle by making the reflection plane of the analyzing crystal 5 convex, thereby enabling improvement of measurement resolution of the spectroscope. The X-rays having wavelengths that vary according to positions on the analyzing crystal can be spectrally separated at a time so that an angle on each position on the analyzing crystal 5 becomes large, and at the same time, a distance to the analyzing crystal 5 from the specimen and a distance to the detector 4 from the analyzing crystal 5 can be made extremely short.