METHOD FOR REGENERATING WASTE COOLANT, METHOD AND SYSTEM FOR TREATING WASTE COOLANT, AND METHOD FOR PRODUCING REGENERATED COOLANT

PROBLEM TO BE SOLVED: To provide a method for regenerating waste coolant, configured to exhibit sufficient coolant performance from waste coolant.SOLUTION: In a method for regenerating a waste coolant, a used coolant (waste coolant) used for cutting out a slice of a silicon ingot or the like, is hou...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HARA KOICHI, WATANABE MASATAKE, TACHIKI ETSUJI
Format: Patent
Sprache:eng
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