SMOOTH SURFACE INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide a smooth surface inspection device capable of detecting defects on a semiconductor- and LED-wafer substrate surface, and an optical surface without using a floating head method and capable of detecting defects near a rotation center.SOLUTION: A built-in type micro he...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIMIZU HIROKI, KO ISAMU, RO BUNKEN, AZUMA TOYOHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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