CONTACT PROBE
PROBLEM TO BE SOLVED: To provide a contact probe of which electric contact characteristics while probing are improved, without reducing abrasion resistance of a contact part and the strength against force in a direction intersecting conductive layers.SOLUTION: In the contact probe, planarly stacked...
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| creator | NAKATANI MASAHIRO NAGATA KAZUSHI TARUMI KENICHI |
| description | PROBLEM TO BE SOLVED: To provide a contact probe of which electric contact characteristics while probing are improved, without reducing abrasion resistance of a contact part and the strength against force in a direction intersecting conductive layers.SOLUTION: In the contact probe, planarly stacked conductive plate members are vertically stood for use. The contact probe includes a stepwise contact film arranged along side faces and a tip surface of the plate members, and provided so as to protrude from the tip surface of the plate members. A thickness in a stacking direction of a tip part which is projected from one part of the contact film, to be in contact with an object to be inspected is thinner than the plate members including the contact film. |
| format | Patent |
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The contact probe includes a stepwise contact film arranged along side faces and a tip surface of the plate members, and provided so as to protrude from the tip surface of the plate members. 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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | CONTACT PROBE |
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