CURRENT SENSOR AND MANUFACTURING METHOD THEREOF

CURRENT SENSOR AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a current sensor which offers superior reliability, linearity, and hysteresis by preventing occurrence of cracks of a shield layer and warpage of a substrate due to stress.SOLUTION: A current sensor (10) includes; a first laminate having a magnetic sensor element (13...

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Hauptverfasser: OKI TOKUAKI, NISHIYAMA YOSHIHIRO
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator OKI TOKUAKI
NISHIYAMA YOSHIHIRO
description PROBLEM TO BE SOLVED: To provide a current sensor which offers superior reliability, linearity, and hysteresis by preventing occurrence of cracks of a shield layer and warpage of a substrate due to stress.SOLUTION: A current sensor (10) includes; a first laminate having a magnetic sensor element (13) located on a first substrate (11), a protective film (15) formed on the first substrate (11) and the magnetic sensor element (13), and a coil (16) formed on the protective film (15); and a second laminate having a shield layer (17) formed on a second substrate (19). The first laminate and the second laminate are bonded together with an adhesive layer (18) in between such that the magnetic sensor element (13) and the shield layer (17) face each other.
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title CURRENT SENSOR AND MANUFACTURING METHOD THEREOF
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