DEVICE FOR ASSISTING WITH SETTING OF CONDITION FOR PULLING SILICON SINGLE CRYSTAL USING SILICA GLASS CRUCIBLE

PROBLEM TO BE SOLVED: To facilitate setting of pulling conditions of single crystal silicon better adapted to characteristic of respective silica glass crucibles.SOLUTION: Measurement data for three-dimensional shapes of silica glass crucibles used by a user are acquired. Next simulation is carried...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUZUKI ERIKO, HIDA SHUJI, SUDO TOSHIAKI
Format: Patent
Sprache:eng
Schlagworte:
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