ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE

PROBLEM TO BE SOLVED: To provide a technique for active control of bandwidth in a DUV gas discharge laser system used in a line narrowed application as a laser light source for integrated circuit manufacturing in photolithography.SOLUTION: A line narrowed high average power high pulse repetition las...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RAO RAJASEKHAR M, TRINTCHAWK FEDO B, ROBERT N JACQUES, WAYNE J DUNSTAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
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