SUPPORT DEVICE AND SUPPORT METHOD, SHEET PEELING DEVICE AND PEELING METHOD, AND SHEET STICKING DEVICE AND STICKING METHOD

PROBLEM TO BE SOLVED: To provide a support device and support method capable of recognizing the position of a notch from a reduced pressure state by sucking and supporting a plate-like member having the notch at a fringe part, a sheet peeling device and peeling method for peeling an adhesive sheet s...

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1. Verfasser: KAWASAKI YOSHIHIKO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a support device and support method capable of recognizing the position of a notch from a reduced pressure state by sucking and supporting a plate-like member having the notch at a fringe part, a sheet peeling device and peeling method for peeling an adhesive sheet stuck to the plate-like member on the basis of the notch, and a sheet sticking device and sticking method for sticking adhesive sheet onto the plate-like member on the basis of the notch.SOLUTION: A support device 11 includes a table 16 provided with a support face 14 for supporting a plate-like member WF, sucking means 19 including sucking means 17 provided on the support face 14 to suck a fringe part of the plate-like member WF, and detection means 22 for detecting a reduced pressure state of the sucking means 17. A sheet peeling device is configured by providing sheet holding means 12 for sticking a peeling tape PT onto an adhesive sheet AS stuck onto the plate-like member WF over the support device 11. The sheet holding means 12 determines a peeling start position on the basis of notches 20, 21 provided in the plate-like member WF, and peels the adhesive sheet from the peeling start position.