CLEANING DEVICE, MEASUREMENT METHOD, AND CALIBRATION METHOD

PROBLEM TO BE SOLVED: To provide a cleaning device capable of effectively and stably cleaning a substrate, and a calibration method of a dissolved gas concentration measurement instrument and a dissolved gas concentration measurement method, which are used for the cleaning device.SOLUTION: The calib...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UCHIBE MASASHI, TANABE ETSUKO, MORI YOSHIHIRO, SHINBARA TERUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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