MEASUREMENT METHOD

PROBLEM TO BE SOLVED: To provide technology advantageous to a reduction in a calculation load required to connect (stitch) measurement data of a partial area in measuring the surface shape of a plane to be measured.SOLUTION: A measurement method for measuring the surface shape of a plane 2 to be mea...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HOSODA MAKI, IWASAKI YASUSHI
Format: Patent
Sprache:eng
Schlagworte:
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