HIGH FREQUENCY POWER SUPPLY DEVICE

PROBLEM TO BE SOLVED: To prevent a high frequency output variation caused by fluctuation generated in output control, when a variation of a low frequency is produced in the load of a high frequency power supply device for supplying high frequency power to a plasma load etc.SOLUTION: The high frequen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UMEHARA MASAO, HAMAISHI SATORU, MAEHARA DAISUKE, IKENARI TATSUYA, NAKAMORI YUYA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS CONTROL OR REGULATION THEREOF CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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