HYDROGEN GAS SENSOR, AND MANUFACTURING METHOD OF THE SAME

HYDROGEN GAS SENSOR, AND MANUFACTURING METHOD OF THE SAME

PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor which has a simple structure, excellent durability, high detection sensitivity, good response time, and excellent hydrogen gas selectivity.SOLUTION: The hydrogen gas sensor includes a sensor element with titanium oxide having fine pores of inner...

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Hauptverfasser: JOO SUNGWOOK, MUTO IZUMI, HARA NOBUYOSHI
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Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator JOO SUNGWOOK
MUTO IZUMI
HARA NOBUYOSHI
description PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor which has a simple structure, excellent durability, high detection sensitivity, good response time, and excellent hydrogen gas selectivity.SOLUTION: The hydrogen gas sensor includes a sensor element with titanium oxide having fine pores of inner diameters of 500 nm or less or fine cylinders of outer diameters of 1000 nm or less and formed on an insulating substrate as a main component, and the electric resistance of the sensor element varies depending on concentration of hydrogen. The sensor element is suitably an anodic oxidation film of a titanium alloy containing palladium or platinum of 0.01 mass% or more. The hydrogen gas sensor is manufactured by producing a titanium thin film or a titanium alloy thin film on the insulating substrate, and then applying anodic oxidation to the titanium thin film or the titanium alloy thin film.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2013040961A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2013040961A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2013040961A3</originalsourceid><addsrcrecordid>eNrjZLD0iHQJ8nd39VNwdwxWCHb1C_YP0lFw9HNR8HX0C3VzdA4JDfL0c1fwdQ3x8HdR8HdTCPFwVQh29HXlYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBobGBiYGlmaGjsZEKQIAt8MozQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>HYDROGEN GAS SENSOR, AND MANUFACTURING METHOD OF THE SAME</title><source>esp@cenet</source><creator>JOO SUNGWOOK ; MUTO IZUMI ; HARA NOBUYOSHI</creator><creatorcontrib>JOO SUNGWOOK ; MUTO IZUMI ; HARA NOBUYOSHI</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor which has a simple structure, excellent durability, high detection sensitivity, good response time, and excellent hydrogen gas selectivity.SOLUTION: The hydrogen gas sensor includes a sensor element with titanium oxide having fine pores of inner diameters of 500 nm or less or fine cylinders of outer diameters of 1000 nm or less and formed on an insulating substrate as a main component, and the electric resistance of the sensor element varies depending on concentration of hydrogen. The sensor element is suitably an anodic oxidation film of a titanium alloy containing palladium or platinum of 0.01 mass% or more. The hydrogen gas sensor is manufactured by producing a titanium thin film or a titanium alloy thin film on the insulating substrate, and then applying anodic oxidation to the titanium thin film or the titanium alloy thin film.</description><language>eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130228&amp;DB=EPODOC&amp;CC=JP&amp;NR=2013040961A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130228&amp;DB=EPODOC&amp;CC=JP&amp;NR=2013040961A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JOO SUNGWOOK</creatorcontrib><creatorcontrib>MUTO IZUMI</creatorcontrib><creatorcontrib>HARA NOBUYOSHI</creatorcontrib><title>HYDROGEN GAS SENSOR, AND MANUFACTURING METHOD OF THE SAME</title><description>PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor which has a simple structure, excellent durability, high detection sensitivity, good response time, and excellent hydrogen gas selectivity.SOLUTION: The hydrogen gas sensor includes a sensor element with titanium oxide having fine pores of inner diameters of 500 nm or less or fine cylinders of outer diameters of 1000 nm or less and formed on an insulating substrate as a main component, and the electric resistance of the sensor element varies depending on concentration of hydrogen. The sensor element is suitably an anodic oxidation film of a titanium alloy containing palladium or platinum of 0.01 mass% or more. The hydrogen gas sensor is manufactured by producing a titanium thin film or a titanium alloy thin film on the insulating substrate, and then applying anodic oxidation to the titanium thin film or the titanium alloy thin film.</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLD0iHQJ8nd39VNwdwxWCHb1C_YP0lFw9HNR8HX0C3VzdA4JDfL0c1fwdQ3x8HdR8HdTCPFwVQh29HXlYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBobGBiYGlmaGjsZEKQIAt8MozQ</recordid><startdate>20130228</startdate><enddate>20130228</enddate><creator>JOO SUNGWOOK</creator><creator>MUTO IZUMI</creator><creator>HARA NOBUYOSHI</creator><scope>EVB</scope></search><sort><creationdate>20130228</creationdate><title>HYDROGEN GAS SENSOR, AND MANUFACTURING METHOD OF THE SAME</title><author>JOO SUNGWOOK ; MUTO IZUMI ; HARA NOBUYOSHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2013040961A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2013</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>JOO SUNGWOOK</creatorcontrib><creatorcontrib>MUTO IZUMI</creatorcontrib><creatorcontrib>HARA NOBUYOSHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JOO SUNGWOOK</au><au>MUTO IZUMI</au><au>HARA NOBUYOSHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>HYDROGEN GAS SENSOR, AND MANUFACTURING METHOD OF THE SAME</title><date>2013-02-28</date><risdate>2013</risdate><abstract>PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor which has a simple structure, excellent durability, high detection sensitivity, good response time, and excellent hydrogen gas selectivity.SOLUTION: The hydrogen gas sensor includes a sensor element with titanium oxide having fine pores of inner diameters of 500 nm or less or fine cylinders of outer diameters of 1000 nm or less and formed on an insulating substrate as a main component, and the electric resistance of the sensor element varies depending on concentration of hydrogen. The sensor element is suitably an anodic oxidation film of a titanium alloy containing palladium or platinum of 0.01 mass% or more. The hydrogen gas sensor is manufactured by producing a titanium thin film or a titanium alloy thin film on the insulating substrate, and then applying anodic oxidation to the titanium thin film or the titanium alloy thin film.</abstract><oa>free_for_read</oa></addata></record>
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title HYDROGEN GAS SENSOR, AND MANUFACTURING METHOD OF THE SAME
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T00%3A14%3A06IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=JOO%20SUNGWOOK&rft.date=2013-02-28&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2013040961A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true