SURFACE DEFECT INSPECTION DEVICE AND INSPECTION METHOD FOR GLASS SUBSTRATE

PROBLEM TO BE SOLVED: To allow a concentration degree of an inspector to be maximized by reducing a determination time of a surface defect of a glass substrate and providing only a surface defect having high possibility of NG to the inspector.SOLUTION: A surface defect inspection device includes: im...

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Bibliographische Detailangaben

Hauptverfasser:	BOCK ANDREAS, MARK CARMAN, LOHSE ERIK, HWANG GYU HONG, VOITEL MARKO, KIM TAE-HO, JUNG JI HWA, KWON JAE HOON
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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