SURFACE DEFECT INSPECTION DEVICE AND INSPECTION METHOD FOR GLASS SUBSTRATE

PROBLEM TO BE SOLVED: To allow a concentration degree of an inspector to be maximized by reducing a determination time of a surface defect of a glass substrate and providing only a surface defect having high possibility of NG to the inspector.SOLUTION: A surface defect inspection device includes: imaging apparatuses 10 and 20 arranged above a glass substrate 1, for imaging a first image and a second image of a surface defect of the glass substrate, respectively; dark field illumination apparatuses 30 arranged below the glass substrate 1, for emitting light transmitted to a side of the imaging apparatuses 10 and 20 through the glass substrate 1; and a detection signal processing unit 40 for calculating positional coordinates of a defect on the first image and positional coordinates of a defect on the second image. An imaging area P1 by the imaging apparatus 10 and an imaging area P1 by the imaging apparatus 20 for an upper surface of the glass substrate are overlapped with each other, and an imaging area P2 by the imaging apparatus 10 and an imaging area P3 by the imaging apparatus 20 for a lower surface of the glass substrate are different from each other.