SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To achieve high integration of a PRAM.SOLUTION: A semiconductor device comprises: a sidewall insulating film covering an inner wall surface of a hole of a first interlayer insulating film; a contact plug embedded in the hole via the sidewall insulating film; a lower electrode a...

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Bibliographische Detailangaben

1. Verfasser:	KAKEGAWA TOMOYASU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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