MANUFACTURING METHOD AND PERFORMANCE ADJUSTMENT METHOD OF OPTICAL SCANNER
PROBLEM TO BE SOLVED: To provide a manufacturing method and a performance adjustment method of an optical scanner, which stabilize the performance of a scanner which inclines a mirror part to cause light to scan, in a high level without adjusting a resonance frequency of the mirror part.SOLUTION: An...
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| creator | TOMITA KAZUMI SUEYOSHI HIROHISA MATSUO TAKASHI KUBO NAOKI IMAI SHOHEI HIRAO TAKEYA YOSHIDA RYUICHI AGAWA KUNIHIRO NODA TETSUYA |
| description | PROBLEM TO BE SOLVED: To provide a manufacturing method and a performance adjustment method of an optical scanner, which stabilize the performance of a scanner which inclines a mirror part to cause light to scan, in a high level without adjusting a resonance frequency of the mirror part.SOLUTION: An optical scanner 2 includes: a fixed frame 4; a driving part 5 which is coupled with the fixed frame and has an electro-mechanical conversion part and an elastic deformation part made into one body; a movable frame 6 which is coupled with the driving part 5 via a shaft part 8 and can be inclined mainly in a first direction; and a mirror part 3 which is coupled with the movable frame 6 via a torsion bar 7 and is inclined mainly in a second direction orthogonal to the first direction. In the manufacturing method and the performance adjustment method of the optical scanner, a resonance frequency of the driving part 5 is adjusted to a prescribed driving part resonance frequency corresponding to a mirror part resonance frequency of the assembled mirror part 3. |
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In the manufacturing method and the performance adjustment method of the optical scanner, a resonance frequency of the driving part 5 is adjusted to a prescribed driving part resonance frequency corresponding to a mirror part resonance frequency of the assembled mirror part 3.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS |
| title | MANUFACTURING METHOD AND PERFORMANCE ADJUSTMENT METHOD OF OPTICAL SCANNER |
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