PRESSURE SENSOR
PROBLEM TO BE SOLVED: To provide a pressure sensor having stable characteristics, and capable of saving cost.SOLUTION: A pressure sensor in which a strain sensor is formed on a measurement diaphragm, includes a semiconductor strain gauge formed on one surface of a first semiconductor substrate; a se...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | KATOU AKIYUKI |
| description | PROBLEM TO BE SOLVED: To provide a pressure sensor having stable characteristics, and capable of saving cost.SOLUTION: A pressure sensor in which a strain sensor is formed on a measurement diaphragm, includes a semiconductor strain gauge formed on one surface of a first semiconductor substrate; a second semiconductor substrate joined with the one surface of the first semiconductor substrate on one surface; first and second measurement chambers provided oppositely to each other over the semiconductor strain gauge so as to be orthogonal to the one surfaces of the first semiconductor and the second semiconductor, and forming the measurement diaphragm including the semiconductor strain gauge; a supporting substrate provided so as to contact with the other surface of the first semiconductor substrate on one surface; a supporting base contacting with the other surface of the supporting substrate through a low-melting glass on one surface, and made from metal; a first pressure guide hole communicating to the first measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base; and a second pressure guide hole communicating to the second measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2013003097A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2013003097A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2013003097A3</originalsourceid><addsrcrecordid>eNrjZOAPCHINDg4NclUIdvUL9g_iYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBobGBgbGBpbmjsZEKQIAMUMdzw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>PRESSURE SENSOR</title><source>esp@cenet</source><creator>KATOU AKIYUKI</creator><creatorcontrib>KATOU AKIYUKI</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a pressure sensor having stable characteristics, and capable of saving cost.SOLUTION: A pressure sensor in which a strain sensor is formed on a measurement diaphragm, includes a semiconductor strain gauge formed on one surface of a first semiconductor substrate; a second semiconductor substrate joined with the one surface of the first semiconductor substrate on one surface; first and second measurement chambers provided oppositely to each other over the semiconductor strain gauge so as to be orthogonal to the one surfaces of the first semiconductor and the second semiconductor, and forming the measurement diaphragm including the semiconductor strain gauge; a supporting substrate provided so as to contact with the other surface of the first semiconductor substrate on one surface; a supporting base contacting with the other surface of the supporting substrate through a low-melting glass on one surface, and made from metal; a first pressure guide hole communicating to the first measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base; and a second pressure guide hole communicating to the second measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130107&DB=EPODOC&CC=JP&NR=2013003097A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130107&DB=EPODOC&CC=JP&NR=2013003097A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KATOU AKIYUKI</creatorcontrib><title>PRESSURE SENSOR</title><description>PROBLEM TO BE SOLVED: To provide a pressure sensor having stable characteristics, and capable of saving cost.SOLUTION: A pressure sensor in which a strain sensor is formed on a measurement diaphragm, includes a semiconductor strain gauge formed on one surface of a first semiconductor substrate; a second semiconductor substrate joined with the one surface of the first semiconductor substrate on one surface; first and second measurement chambers provided oppositely to each other over the semiconductor strain gauge so as to be orthogonal to the one surfaces of the first semiconductor and the second semiconductor, and forming the measurement diaphragm including the semiconductor strain gauge; a supporting substrate provided so as to contact with the other surface of the first semiconductor substrate on one surface; a supporting base contacting with the other surface of the supporting substrate through a low-melting glass on one surface, and made from metal; a first pressure guide hole communicating to the first measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base; and a second pressure guide hole communicating to the second measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZOAPCHINDg4NclUIdvUL9g_iYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBobGBgbGBpbmjsZEKQIAMUMdzw</recordid><startdate>20130107</startdate><enddate>20130107</enddate><creator>KATOU AKIYUKI</creator><scope>EVB</scope></search><sort><creationdate>20130107</creationdate><title>PRESSURE SENSOR</title><author>KATOU AKIYUKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2013003097A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2013</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KATOU AKIYUKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KATOU AKIYUKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PRESSURE SENSOR</title><date>2013-01-07</date><risdate>2013</risdate><abstract>PROBLEM TO BE SOLVED: To provide a pressure sensor having stable characteristics, and capable of saving cost.SOLUTION: A pressure sensor in which a strain sensor is formed on a measurement diaphragm, includes a semiconductor strain gauge formed on one surface of a first semiconductor substrate; a second semiconductor substrate joined with the one surface of the first semiconductor substrate on one surface; first and second measurement chambers provided oppositely to each other over the semiconductor strain gauge so as to be orthogonal to the one surfaces of the first semiconductor and the second semiconductor, and forming the measurement diaphragm including the semiconductor strain gauge; a supporting substrate provided so as to contact with the other surface of the first semiconductor substrate on one surface; a supporting base contacting with the other surface of the supporting substrate through a low-melting glass on one surface, and made from metal; a first pressure guide hole communicating to the first measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base; and a second pressure guide hole communicating to the second measurement chamber at one end provided on the supporting substrate, and opening to the outside at the other end provided on the supporting base.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_JP2013003097A |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | PRESSURE SENSOR |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-06T11%3A47%3A37IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KATOU%20AKIYUKI&rft.date=2013-01-07&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2013003097A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |