DISPLACEMENT MEASURING DEVICE, PROGRAM

PROBLEM TO BE SOLVED: To accurately measure displacement information of a measuring object.SOLUTION: A displacement measuring device emits light to a glass plate and a measuring object in a vertical direction, receives reflected light reflected in a coaxial direction with the light using a birefring...

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Bibliographische Detailangaben
1. Verfasser: KANAI MIYUKI
Format: Patent
Sprache:eng
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