FLATNESS MEASURING DEVICE

PROBLEM TO BE SOLVED: To improve measurement accuracy and a region resolution in a flatness measuring device using a Shack Hartmann wavefront sensor.SOLUTION: A flatness measuring device comprises a light source 1 which emits primary light flux B1 that is light flux which can be made parallel, light...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAMADA MOTOAKI, SATO SEICHI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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