FLUIDIZED-BED REACTOR

PROBLEM TO BE SOLVED: To provide a fluidized-bed reactor capable of uniformly supplying enough heat for silicon deposition and flowing gas, capable of mass-producing a polycrystalline silicon, and easy to assemble, install, and maintain.SOLUTION: The fluidized-bed reactor includes a reaction tube, a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JUNG YUNSUB, YOON YEOKYUN, KIM KEUNHO, KIM JIN-SUNG
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!