PATTERN GENERATOR, PATTERN FORMING APPARATUS AND EXPOSURE APPARATUS

PROBLEM TO BE SOLVED: To provide a pattern generator capable of easily and accurately forming various patterns on a plate.SOLUTION: Pattern generators 22A to 22E are provided on an active mask 14. Each of the pattern generators 22A to 22E includes a plurality of opening pattern groups disposed at predetermined intervals in an X-axis direction and disposed while being deviated at predetermined distances in a Y-axis direction. Furthermore, each opening pattern group includes a plurality of opening patterns disposed at predetermined intervals in the Y-axis direction. Therefore, in each pattern generator, the opening patterns are present at intervals where they do not overlap each other in the Y-axis direction as a whole. Furthermore, at the incident side of illumination light IL of the plurality of opening pattern groups, a micro-lens array is disposed for converging the illumination light IL to each of the plurality of opening patterns. The plurality of opening patterns are individually opened and closed by an opening/closing mechanism synchronously with the movement of a plate P in the X-axis direction.