METHOD OF UPDATING CALIBRATION DATA AND METHOD OF MANUFACTURING DEVICE

PROBLEM TO BE SOLVED: To realize position detection with high long term stability without being affected by changes in refractive index of a medium.SOLUTION: The method of updating calibration data of a first position detection system configured to determine the position of an object is presented. T...

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Hauptverfasser:	VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS, FRANCISCUS VAN DE MAST
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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