STATE PREDICTION METHOD FOR PROCESS AND PROCESS CONTROL UNIT USING THE SAME

PROBLEM TO BE SOLVED: To provide a state prediction method for process that shortens a calculation time by composing a multiple regression model which consists of less explanation variables than before and has high precision, and a process control unit using the same.SOLUTION: A process control unit...

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Bibliographische Detailangaben
Hauptverfasser: FURUYA HIDEHIKO, YEH YIUN, OGAWA MASATOSHI, OKAI HARUTOSHI, SAKAMOTO SHUICHI, KAWANARI SHO
Format: Patent
Sprache:eng
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