COMPOSITION FOR PRODUCTION OF COMPLEX OXIDE THIN FILM

PROBLEM TO BE SOLVED: To provide a new composition which is based on diethyl zinc or a partial hydrolyzate of an organic zinc compound such as diethyl zinc etc., and with which a complex oxide thin film applicable to an oxide semiconductor film etc. such as an IGZO can be deposited.SOLUTION: The com...

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Bibliographische Detailangaben
Hauptverfasser:	HAGA KENICHI, TOKUTOME KOICHI, INABA KOICHIRO, TOYODA KOJI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F INORGANIC CHEMISTRY METALLURGY
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