SEMICONDUCTOR CHIP TESTING APPARATUS AND OPERATING PROCEDURE FOR SEMICONDUCTOR CHIP TESTING APPARATUS

PROBLEM TO BE SOLVED: To provide a highly productive semiconductor chip testing apparatus capable of accurately and automatically accomplishing contact alignment of a semiconductor chip and a probe.SOLUTION: A semiconductor chip testing apparatus comprises a probe unit 1 having six drive shafts, a p...

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Bibliographische Detailangaben

Hauptverfasser:	SHIRAFUJI YASUNARI, TAKAYAMA KAZUYOSHI, HISAOKA YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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