SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD OF DISPLAYING RECIPE TRANSITION

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of notifying a transition state of a recipe, a substrate processing method, a method of manufacturing a semiconductor device, and a method of displaying recipe transition.SOLUTION: In this substrate processing device including a recipe storage means for storing at least one or more recipes each composed of a plurality of steps, a display control means for receiving execution instructions to make the recipes executed, and a display means for displaying the recipe instructed by the display control means on an operation screen, while executing a prescribed recipe, if execution instructions for making other recipes stored in the recipe storing means executed is received, information for steps being currently executed in other recipes and information for steps being executed in the prescribed recipe when the execution instructions are produced are displayed on the operation screen, and a factor in production of the execution instructions to make the other recipes executed is displayed between the prescribed recipe and the other recipes.