PREPARATION METHOD OF SPECIMEN FOR OBSERVING DEFECTIVE PART OF SEMICONDUCTOR DEVICE SUBSTRATE

PROBLEM TO BE SOLVED: To provide a preparation method of a specimen for observing a defective part of a semiconductor device substrate, which enables the fine defective part of the semiconductor device substrate to be easily specified in a short time, so that a thin specimen suitable for transmissio...

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Bibliographische Detailangaben
1. Verfasser:	WARATANI SHUZO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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