SLIT LIGHT LUMINANCE DISTRIBUTION DESIGN METHOD AND OPTICAL CUTTING IRREGULARITY FLAW DETECTION DEVICE

PROBLEM TO BE SOLVED: To provide a slit light luminance distribution design method and an optical cutting irregularity flaw detection device for performing stable optical cutting irregularity flaw detection corresponding to the range widening and speeding-up of surface flaw inspection.SOLUTION: The...

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Hauptverfasser: YAMAHIRA NAOFUMI, KODAMA TOSHIBUMI
Format: Patent
Sprache:eng
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