MASK FOR ORGANIC ELECTROLUMINESCENCE

PROBLEM TO BE SOLVED: To provide a mask for organic electroluminescence having an opening of a stripe pattern, in which mask strength is improved and a pitch accuracy after mask expansion can be made to be highly accurate.SOLUTION: In a mask for organic electroluminescence having an opening of a str...

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Bibliographische Detailangaben
Hauptverfasser:	OGAWARA TAKESHI, MATSUDATE NORIHARU, KUROKI TOSHIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a mask for organic electroluminescence having an opening of a stripe pattern, in which mask strength is improved and a pitch accuracy after mask expansion can be made to be highly accurate.SOLUTION: In a mask for organic electroluminescence having an opening of a stripe pattern, a distance L from an end of the opening relative to a width W of the opening satisfies formula: 1/2 W≤L≤20 W, and, in a region from the end of the opening to the distance L, a cross-sectional shape of the opening has a small cross section in the opening as compared with the cross-sectional shape of the opening in other regions.