SUBSTRATE HOLDER STOCKER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE HOLDER MOVING METHOD USING THE SUBSTRATE HOLDER STOCKER DEVICE

PROBLEM TO BE SOLVED: To provide a substrate holder stocker device capable of reducing footprint.SOLUTION: A substrate holder stocker chamber 18 storing a substrate holder to be conveyed in a process chamber which performs a vacuum processing to a substrate comprises: a movable table A which holds a...

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Hauptverfasser: TOSAKA TAKASHI, SONE HIROSHI
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creator TOSAKA TAKASHI
SONE HIROSHI
description PROBLEM TO BE SOLVED: To provide a substrate holder stocker device capable of reducing footprint.SOLUTION: A substrate holder stocker chamber 18 storing a substrate holder to be conveyed in a process chamber which performs a vacuum processing to a substrate comprises: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism 31 for allowing the substrate holder which is held by one of the movable tables A and B stopped at a predetermined positions to be held by the other of the movable tables A and B.
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subjects BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SEMICONDUCTOR DEVICES
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title SUBSTRATE HOLDER STOCKER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE HOLDER MOVING METHOD USING THE SUBSTRATE HOLDER STOCKER DEVICE
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