PIEZOELECTRIC DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric device in which the joint force between a first plate and a second plate is strong without anode joint.SOLUTION: A piezoelectric device (100A) has a piezoelectric vibration piece (10) which vibrates upon application of a voltage, a first plate (11A) h...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a piezoelectric device in which the joint force between a first plate and a second plate is strong without anode joint.SOLUTION: A piezoelectric device (100A) has a piezoelectric vibration piece (10) which vibrates upon application of a voltage, a first plate (11A) having a first joint face (M1) which is formed on the outer periphery of a cavity (CT) so as to form the cavity in which the piezoelectric vibration piece is mounted, and a second plate (12A) which has a second joint face (M2) formed on the outer periphery of the cavity and is joined to the first plate. A first metal film (s1), a second metal film (r1) having different metal from that of the first metal film (s1), a first metal film (s2), a glass layer (g1) formed of glass, a first metal film (s3), a second metal film (r2) and a first metal film (s4) are formed between the first joint face and the second joint face. |
---|