SEMICONDUCTOR DEVICE HAVING ELEMENT ISOLATION REGION AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide semiconductor device having an element isolation region and its manufacturing method in which improvements such as an expansion of an element formation region interval by an expansion of an element isolation region are made.SOLUTION: On a semiconductor substrate 11,...

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1. Verfasser: FUJIMAGARI JUNICHIRO
Format: Patent
Sprache:eng
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