VERTICAL TYPE XZ SLIDE DEVICE WITH BUILT-IN LINEAR MOTOR

PROBLEM TO BE SOLVED: To provide a vertical type XZ slide device which shortens tact time of a movable table by moving an X table and a Z table independently against a bed and by making structure simple.SOLUTION: A bed 1 comprises a first plane portion 38 extending in horizontal direction with an X table 2 attached, a second plane portion 39 extending in vertical direction with a Z table 3 attached, and a third plane portion 40 where both plane portions cross each other. A movable table 32 is located in relation to the third plane portion 40 and placed in such a way that it overlaps the X table 2 and the Z table 3 via linear movement guide units 4 and 5. The movable table 32 is configured to be capable of positioning itself at a prescribed position defined by X direction and Z direction in relation to the bed 1, by being moved in X direction by an X linear motor 42 and moved in Z direction by a Z linear motor 41.