PROTECTION OF ACTIVE LAYERS OF MEMORY CELLS DURING PROCESSING OF OTHER ELEMENTS

PROBLEM TO BE SOLVED: To properly remove surface oxidation from selected conductive bodies, while avoiding damaging a memory structure.SOLUTION: A method of fabricating an electronic structure comprises providing a conductive layer (102), providing a dielectric layer (100) over the conductive layer,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	STEVEN AVANZINO, IGOR SOKOLIK, SUZETTE K PANGRLE, NICHOLAS H TRIPSAS, JEFFREY A SHIELDS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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