VIBRATION DAMPER FOR VACUUM PUMP

PROBLEM TO BE SOLVED: To provide a vibration damper for a vacuum pump, in particular, a turbomolecular vacuum pump, which can achieve a high damping coefficient due to absence of metal-to-metal contact and in which a vacuum chamber can be electrically insulated from a valve chamber.SOLUTION: In the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GIORS SILVIO, L BONMASSAR, QUARTARONE CARMELO
Format: Patent
Sprache:eng
Schlagworte:
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