DRY VACUUM PUMP DEVICE

PROBLEM TO BE SOLVED: To provide a dry vacuum pump device comprising one or a plurality of a multiple stage volume type dry vacuum pump connected in series, having a silencer capable of effectively reducing a noise of a gas discharged from a final stage discharge port and a middle stage hollow discharge port of the multiple stage volume type dry vacuum pump in a wide frequency region from a low frequency region to a high frequency region.SOLUTION: The dry vacuum pump device 10 comprises a multiple stage volume type dry vacuum pump having a final stage discharge port and a middle stage hollow discharge port (pressure relief hole 19). An exhaust part check valve 51 is connected with the final stage discharge port 18, and an overcompression preventing check valve (middle part check valve 52) is connected with the middle part hollow discharge port (pressure relief hole 19). The check valve and the discharge port of the overcompression preventing check valve are connected with an exhaust passage 56. A silencer 53 is provided in the exhaust passage 56. The exhaust passage 56 on the downstream side of the silencer 53 is connected with an exhaust port.