PROXIMITY EXPOSURE APPARATUS, METHOD FOR LOADING AND UNLOADING SUBSTRATE IN PROXIMITY EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING PANEL SUBSTRATE FOR DISPLAY

PROBLEM TO BE SOLVED: To prevent damages on a substrate, when there is an abnormality at loading and unloading of the substrate by the use of a plurality of push-up pin units, each having a push-up pin and a motor for vertically moving the push-up pin, by making motors of all push-up pin units stop...

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Bibliographische Detailangaben

Hauptverfasser:	MOCHIZUKI MASAAKI, KOTAKE HIDEO, FUJII TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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