SUBSTRATE HOLDING DEVICE

PROBLEM TO BE SOLVED: To appropriately hold a substrate made of a brittle material such as a ceramics material while preventing breakage. SOLUTION: A contact surface with a ceramic substrate 31 of at least either of a holding part body 322 and a clamp claw 340 constituting this substrate holding dev...

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Bibliographische Detailangaben
1. Verfasser: SUHARA SHINSUKE
Format: Patent
Sprache:eng
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