SUBSTRATE STORAGE CONTAINER AND COVER

PROBLEM TO BE SOLVED: To provide a substrate storage container and a cover, such that even when substrate holding force by a retainer is increased, the cover is prevented from deforming and sensing and seal performance of the cover are not spoiled. SOLUTION: The cover includes a cover body capable o...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	YAJIMA TOSHITSUGU
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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