PASTE FOR ELECTRON FIELD EMITTER MANUFACTURE, AND ITS USAGE

PROBLEM TO BE SOLVED: To eliminate a problem that there is a limit of precision and resolution that can be attained by a complete screen printing when a triode of less than 100 μm of dimension is manufactured, and solve a problem such as prevention of electric short circuit and deterioration of accuracy of positioning of different screens at the time of multilayer formation. SOLUTION: A gate triode has a physical gate electrode between a cathode and an anode of a field emitter, and an inversion gate triode has a physical field emitter cathode between a gate and the anode. A thick film composition of light image forming type such as Fodel (R) silver in which, in addition to silver or dielectric, a small amount of low-melting point glass frit is contained in an organic medium containing a light image forming type component such as a photo-polymerization initiator and an optical monomer in a form of particulate, and a dielectric paste composition (respectively, DC 206 and DG201 etc.) is screen-printed on a substrate adjusting the thickness of a uniform layer, and a contact type photomask including a desired pattern is arranged mutually in contact with the film and is exposed to ultraviolet (UV) rays. Then, this film is developed in a weak sodium carbonate aqueous solution, and by a thick film method of a light image forming type in which a light image forming treatment is applied on the thick film with screen printing, a small feature dimension of 10 μm is attained. COPYRIGHT: (C)2011,JPO&INPIT