MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of a semiconductor device and a manufacturing method which can reduce a replacement frequency of a consumable member. SOLUTION: The manufacturing apparatus of the semiconductor device includes a first storage part for storing an amount of consumption of the consumable member every processing condition of a substrate, a second storage part for storing a working limit and a present amount of consumption of the consumable member every process chamber, a computation part for computing the processable number of substrates every process chamber with reference to the first and second storage part, and an allotment part for instructing a process for the substrates based on the computed processable number every process chamber. COPYRIGHT: (C)2011,JPO&INPIT