PIEZOELECTRIC DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric device having a microstructure which raises the degree of freedom of the arrangement of an element on a substrate and wiring. SOLUTION: A piezoelectric device 1 includes a substrate 10 on the top surface of which a conductive layer 13 including an ins...
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| creator | HISHINUMA KEIICHI |
| description | PROBLEM TO BE SOLVED: To provide a piezoelectric device having a microstructure which raises the degree of freedom of the arrangement of an element on a substrate and wiring. SOLUTION: A piezoelectric device 1 includes a substrate 10 on the top surface of which a conductive layer 13 including an insulating layer 14 on its surface is formed and in which a plurality of diaphragm structures 15 are provided in parallel with each other, a plurality of piezoelectric elements 20 which are arranged corresponding to the diaphragm structure 15 on the insulating layer 14 of the substrate 10 and in which the spontaneous polarization P of a piezoelectric film 22 is aligned in a direction which faces an upper electrode 23 side from a lower electrode 21 side, and the lower electrode 21 and the upper electrode 23 are individual electrodes provided separately from each other between the plurality of piezoelectric elements 20, and electric wiring 28 which electrically connects the upper electrodes 23 of the plurality of piezoelectric elements 20 to the conductive layer 13. COPYRIGHT: (C)2011,JPO&INPIT |
| format | Patent |
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SOLUTION: A piezoelectric device 1 includes a substrate 10 on the top surface of which a conductive layer 13 including an insulating layer 14 on its surface is formed and in which a plurality of diaphragm structures 15 are provided in parallel with each other, a plurality of piezoelectric elements 20 which are arranged corresponding to the diaphragm structure 15 on the insulating layer 14 of the substrate 10 and in which the spontaneous polarization P of a piezoelectric film 22 is aligned in a direction which faces an upper electrode 23 side from a lower electrode 21 side, and the lower electrode 21 and the upper electrode 23 are individual electrodes provided separately from each other between the plurality of piezoelectric elements 20, and electric wiring 28 which electrically connects the upper electrodes 23 of the plurality of piezoelectric elements 20 to the conductive layer 13. 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| language | eng |
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| subjects | CORRECTION OF TYPOGRAPHICAL ERRORS ELECTRICITY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS |
| title | PIEZOELECTRIC DEVICE |
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