METHOD AND DEVICE OF CONTROLLING CONDENSER COOLING WATER FOR VAPOR INJECTION VACUUM PUMP
PROBLEM TO BE SOLVED: To provide a device and a method of controlling a water level of condenser cooling water in a condenser of the vapor injection vacuum pump under a non-atmospheric pressure environment. SOLUTION: This method of controlling the condenser cooling water includes a process for measu...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a device and a method of controlling a water level of condenser cooling water in a condenser of the vapor injection vacuum pump under a non-atmospheric pressure environment. SOLUTION: This method of controlling the condenser cooling water includes a process for measuring the water level of the cooling water of the condensers 1, 2 by using a measuring means 10 suitable for vacuuming processing in a measurement pot 9 mounted outside of the condenser as a container communicated with the condensers 1, 2, and a process for using the measurement value as measurement variable to adjust a transporting amount of a speed-controlled cooling water pump 8. COPYRIGHT: (C)2011,JPO&INPIT |
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