COMPOSITION FOR PRODUCTION OF DOPED ZINC OXIDE THIN FILM, PROCESS FOR PRODUCTION OF DOPED ZINC OXIDE THIN FILM

PROBLEM TO BE SOLVED: To provide a composition for production of a doped zinc oxide thin film, with which the zinc oxide thin film with transparency and low resistance can be obtained without heating at a film manufacturing stage or with heating at 300°C or less even if heated, and to provide a proc...

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Bibliographische Detailangaben
Hauptverfasser: HAGA KENICHI, TOKUTOME KOICHI, INABA KOICHIRO, YOSHINO KENJI, TOYODA KOJI
Format: Patent
Sprache:eng
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