MECHANISM AND METHOD FOR DETECTING FOCUS

PROBLEM TO BE SOLVED: To provide a focus detecting mechanism which detects a focus using image signals for which a sample image is captured and further detects highly accurate focus position. SOLUTION: The focus detecting mechanism includes: an illumination light source 1 for performing emission to...

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Hauptverfasser: KUSUSE HARUHIKO, MIYAZAKI KOJI, NOZAWA HIROTO, TAKIZAWA HIDERO
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creator KUSUSE HARUHIKO
MIYAZAKI KOJI
NOZAWA HIROTO
TAKIZAWA HIDERO
description PROBLEM TO BE SOLVED: To provide a focus detecting mechanism which detects a focus using image signals for which a sample image is captured and further detects highly accurate focus position. SOLUTION: The focus detecting mechanism includes: an illumination light source 1 for performing emission to a sample; an imaging optical system including a first photodetection means 23 for outputting the image signal of the sample; a relative distance change means 9 for changing a distance between the sample and the focus of an objective lens; a control means 32 for driving the illumination light source; a position detection means 11 for detecting the position in the optical axis direction of the objective lens or a sample stage; a second photodetection means 4 for monitoring the light quantity of illumination light; and a signal processing apparatus 40 for outputting focusing position information. The signal processing apparatus 40 includes: a means 44 for calculating the contrast of the sample image; a means 45 for normalizing the calculated contrast using monitor signals; and a means 46 for detecting the position of the objective lens or the sample stage for maximizing the contrast on the basis of a series of relations between the normalized contrast and the position signal. COPYRIGHT: (C)2011,JPO&INPIT
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
title MECHANISM AND METHOD FOR DETECTING FOCUS
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