MECHANISM AND METHOD FOR DETECTING FOCUS
PROBLEM TO BE SOLVED: To provide a focus detecting mechanism which detects a focus using image signals for which a sample image is captured and further detects highly accurate focus position. SOLUTION: The focus detecting mechanism includes: an illumination light source 1 for performing emission to...
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creator | KUSUSE HARUHIKO MIYAZAKI KOJI NOZAWA HIROTO TAKIZAWA HIDERO |
description | PROBLEM TO BE SOLVED: To provide a focus detecting mechanism which detects a focus using image signals for which a sample image is captured and further detects highly accurate focus position. SOLUTION: The focus detecting mechanism includes: an illumination light source 1 for performing emission to a sample; an imaging optical system including a first photodetection means 23 for outputting the image signal of the sample; a relative distance change means 9 for changing a distance between the sample and the focus of an objective lens; a control means 32 for driving the illumination light source; a position detection means 11 for detecting the position in the optical axis direction of the objective lens or a sample stage; a second photodetection means 4 for monitoring the light quantity of illumination light; and a signal processing apparatus 40 for outputting focusing position information. The signal processing apparatus 40 includes: a means 44 for calculating the contrast of the sample image; a means 45 for normalizing the calculated contrast using monitor signals; and a means 46 for detecting the position of the objective lens or the sample stage for maximizing the contrast on the basis of a series of relations between the normalized contrast and the position signal. COPYRIGHT: (C)2011,JPO&INPIT |
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SOLUTION: The focus detecting mechanism includes: an illumination light source 1 for performing emission to a sample; an imaging optical system including a first photodetection means 23 for outputting the image signal of the sample; a relative distance change means 9 for changing a distance between the sample and the focus of an objective lens; a control means 32 for driving the illumination light source; a position detection means 11 for detecting the position in the optical axis direction of the objective lens or a sample stage; a second photodetection means 4 for monitoring the light quantity of illumination light; and a signal processing apparatus 40 for outputting focusing position information. 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SOLUTION: The focus detecting mechanism includes: an illumination light source 1 for performing emission to a sample; an imaging optical system including a first photodetection means 23 for outputting the image signal of the sample; a relative distance change means 9 for changing a distance between the sample and the focus of an objective lens; a control means 32 for driving the illumination light source; a position detection means 11 for detecting the position in the optical axis direction of the objective lens or a sample stage; a second photodetection means 4 for monitoring the light quantity of illumination light; and a signal processing apparatus 40 for outputting focusing position information. The signal processing apparatus 40 includes: a means 44 for calculating the contrast of the sample image; a means 45 for normalizing the calculated contrast using monitor signals; and a means 46 for detecting the position of the objective lens or the sample stage for maximizing the contrast on the basis of a series of relations between the normalized contrast and the position signal. COPYRIGHT: (C)2011,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES |
title | MECHANISM AND METHOD FOR DETECTING FOCUS |
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